CMP Slurry PROCESS MATERIALS REFERENCEA requirements template you can adapt
The CSV separates buyer requirements, supplier responses, evidence references and open items. It covers application, performance, product preparation, quality, supply and commercial terms. Populate the fields that are relevant; do not invent process limits to complete a spreadsheet.
Describe the application and disclosure boundary
- Target material, adjacent / stopping films and deposited-film identities.
- Bulk removal, clearing, barrier, buff or another process stage.
- Wafer size, process platform and relevant incoming thickness or topography.
- Representative feature widths, densities and limiting patterns where shareable.
- Development, qualification or production phase and intended timeline.
- Tool, pad, conditioner, endpoint and post-CMP cleaning context.
Share only information the buyer is authorized to disclose. Identify which fields require a confidentiality agreement. An initial inquiry can describe film categories and acceptance intent without transmitting proprietary layouts or process details.
Specify the result and its measurement
| Requirement | Add to the RFQ | Ask the supplier to distinguish |
|---|---|---|
| Removal / clearing | Target rate or clearing-time intent and method. | Guaranteed specification, typical data or proposed target. |
| Selectivity | Film pairs, individual rates and intended film-loss limits. | Blanket measurements versus patterned evidence. |
| Uniformity | Map, edge exclusion and formula. | Different calculation conventions. |
| Defects | Classification, inspection sensitivity and surface state. | As-polished versus after-clean results. |
| Topography | Dishing, erosion or recess definitions and pattern families. | Nominal endpoint versus overpolish window. |
| Corrosion / surface | Static loss, pits, roughness and relevant hold conditions. | Static exposure versus polishing evidence. |
| Consistency | Lots, tools and process range to be covered. | A single trial versus repeatability data. |
Ask for the supplier’s recommended grade and the evidence connecting it to these requirements. Leave acceptance limits buyer-defined; a supplier’s typical data should not become a specification by accident.
Product, preparation and quality requirements
- Abrasive and particle limits only where required by the process; include the measurement method.
- Supplied and point-of-use concentration, pH and any other relevant control attributes.
- Approved dilution / activation, water, mixing and use-life instructions.
- Filter, tubing, container and delivery compatibility evidence where needed.
- Packaging, storage conditions, shelf life and minimum remaining life at delivery.
- TDS, SDS, sample COA, traceability and relevant impurity specifications.
- Lot consistency, release tests, retained samples and excursion support.
- Notification and acceptance process for formulation, raw material, method, process and site changes.
Supply, commercial and contractual response
State the buying region, qualification quantities, forecast range and lead-time expectation. Ask which site supplies the grade and whether any backup path is already qualified. Request continuity information appropriate to the purchase phase.
| Commercial topic | Normalize the response |
|---|---|
| Price / volume | Currency, supplied unit, tiers, MOQ and forecast commitments. |
| Samples / qualification | Sample policy, quantities, technical support and transition charges. |
| Delivery / packaging | Freight basis, container charges, delivery frequency and applicable transport constraints. |
| Terms | Payment, quote validity and price adjustment or protection basis. |
| Nonconformance | Definition, notification, investigation, replacement / credit and root-cause support. |
| Change / discontinuation | Notice, approval requirements, bridging evidence and requalification responsibilities. |
Evaluate responses without hiding evidence gaps
Separate a supplier’s claimed capability from supplied documentation and buyer-verified results. Normalize cost only after confirming product state and approved preparation. Use the evaluation matrix for tests and the qualification checklist for controls.
- Require the exact product identifier and applicable document revisions.
- Record missing data as open items with an owner.
- Compare the same definitions and units across responses.
- Gate critical technical and quality requirements before scoring.
- Advance a shortlist into controlled trials; do not treat the RFQ response as production approval.